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Polymer MEMS technology makes ultrasound imaging truly popular
Release time:
2025-03-12 09:37
To make ultrasound transducers cheaper in the medical market, researchers at the University of British Columbia (UBC) have designed capacitive micromachined ultrasound transducers (CMUTs) using polymers instead of traditional silicon materials.
The research is detailed in a paper titled "Fabrication and testing of polymer-based capacitive micromachined ultrasound transducers for medical imaging," published in the journal Microsystems & Nanoengineering. The researchers describe how they used more economical materials such as SU-8 photoresist polymer and Omnicoat to replace silicon-based materials to build thin and sensitive ultrasound transducer arrays. In just six steps, and at an estimated unit cost of less than $100, the researchers fabricated micrometer-scale biocompatible parylene-sealed polymer CMUTs (poly-CMUTs).
The device is a linear array consisting of 64 columns of CMUT elements, each column containing 4 × 75 CMUT units (plastic MEMS), with a spacing of 550 μm between columns. The linear array allows researchers to conduct precise ultrasound imaging experiments using beamforming technology. The key to manufacturing these poly-CMUTs is encapsulating the metal electrodes inside the thin film rather than on top, achieving a thin stack and low operating voltage similar to traditional CMUTs made of polysilicon or silicon nitride. The researchers report that the poly-CMUTs can be pre-biased to operate as passive devices during reception and have a low excitation voltage during ultrasound transmission (i.e., a 12V AC signal superimposed on a 10V DC signal).
Another interesting aspect of this research is that the maximum processing temperature does not exceed 150°C, meaning that these poly-CMUTs can be fabricated directly on silicon-based electronic devices such as beamformers and Tx/Rx switches. The researchers anticipate that this ultrasound transducer can be integrated into the flexible substrate of conformal wearable health monitoring systems. Robert Rohling, a co-author of the paper and a professor of electrical and computer engineering at UBC, commented: "With this technology, you can miniaturize these sensors and use them to look at your arteries and veins. You can also put them on your chest to continuously monitor your heart in daily life. This technology opens up many different possibilities."
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